NOWAKOWSKI , W. Precise Deposition of Thin Films using Electrochemical Atomic Layer Deposition: Applications in Energy Storage, Catalysis, and Microelectronics. Journal of Humanities and Applied Science Research, [S. l.], v. 4, n. 1, p. 1–16, 2021. Disponível em: https://journals.sagescience.org/index.php/JHASR/article/view/66. Acesso em: 22 nov. 2024.